SiC Parts

SiC Coated Product
  • Product Overview
    SiC coated parts manufactured with CVD process to prevent out gassing and particle from raw materials (Graphite).
  • It is used as a key  part in CVD process in each field and is produced using Graphite as raw material.
CVD SiC Ring 
  • Product Overview
    Bulk SiC products manufactured with CVD process to improve life time and yield for parts used in Semiconductor processes.
  • ​Product Characteristics
​          - Life time: 1.5 times longer than Si (Up to 10 times)
            - Super pure: Purity of 99.999% (No Particle)
​            - Excellent hardness and strength compared to Si, high corrosion resistance.
            - No thermal deformation and strong at high temperature